Proteus Industries » Tofco Flow Management Products

Tofco Flow Management Products

Proteus is the exclusive US distributor of Tofco flow management products, including flow meters for ultrapure liquids and flow controllers. These high-quality products are designed and manufactured in Japan for the demanding requirements of the semiconductor industry and other critical applications.

Ultrasonic flow meters are manufactured from PFA in a clean room environment and are designed for measurement of ultrapure liquids in the semiconductor industry.

Please contact Proteus for prices, manuals and other information. Customers outside the US and Canada should order directly from Tofco (www.tofco.jp).

Tofco Flow Meter Selection Guide

PRODUCT FAMILY		FEATURES

USF100A Series Tofco Meters for Ultrapure Applications
		• Ultrasonic flow meter • 500 mL/min - 50 L/min • PFA construction • Use to 50°C, 60 PSI • Ultrapure semiconductor applications • Display flow rate or integrated volume

USF200S Series Tofco Meters for Ultrapure Applications
		• Ultrasonic flow meter • 300 mL/min or 5 L/min ranges • PFA construction • Use to 50°C, 60 PSI • Ultrapure semiconductor applications • 4–20 mA, pulse and RS-485 outputs

USF300C Series Tofco Meters for Ultrapure Applications
		• Ultrasonic flow meter • 20 L/min or 50 L/min ranges • PFA construction • Use to 50°C, 60 PSI • Ultrapure semiconductor applications • 4–20 mA, pulse and RS-485 outputs

Fin Flow Optical Flow Meter
		• Optically detected rotor measures flow • 100 mL/min to 50L/min ranges • PFA and PTFE construction • Use to 50°C, 50 PSI • Ultrapure semiconductor applications • Pulsed output, other options available

Duo Flow Variable Area Meter
		• 15 mL/min to 1.5 L/min ranges • PFA and PTFE construction • Use to 40°C, 50 PSI • Ultrapure semiconductor applications • 4–20 mA, 1–5 VDC or 1–10 VDC outputs

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